Chengdu Guotai Vacuum Equipment Co.,Ltd

Chengdu, China

This equipment is designed for precision optical thin film coating production, system unit and overall structure good to meet the requirements of the optical thin film production process, suitable for coating anti-reflection film, bandpass membrane, IR film and other coating film system.It is equipped with high-precision film thickness control system, excellent performance of electron gun, high degree automation of coating control system, etc. It's the ideal of high precision optical thin film plating equipment.

1.Vacuum chamber sizeφ1350mm×H1500mm, which is made of high grade 304 stainless steel , inner surface by polishing treatment, surface with cooling water jacket, postposition pumping system，vertical front opening door structure, viewing window installed in the door, and equipped with glass panel, vacuum chamber stainless steel plate thickness 1mm , convenient to clean and maintain, up cover board installed lifting rings, in bleeding point there installed electric throttle flap, and 1 pcs KF40 deflation valve. 2.Substrate holder speed 3～30rpm， AC variable frequency speed regulation(Korea LG)，up driven way.Workpiece plate axial and radial runout≦±2mm;ferrofluidic seal, Bearing adopts Japanese NSK，whole substrate holder structure adopts 304 stainless steel. 3.Vacuum pumping system：2sets 28inches diffusion pump+ 1set British Edward Monoblock pump275+1setBritish Edward roots pumpEH2400，and high vacuum pneumatic baffle valve form fast and efficient vacuum pumping system，which can meet pumping requirements during coating.Equipped with compound vacuum gauge, which used for measuring high and low vacuum degree.Between valves there is safety interlock to make sure equipment safety use. 4.Evaporation source：Electron gun 2pcs 270 degree，E-beam, power: 8 kw adjustable, 1set resistance evaporation, single power supply 5KW, evaporation current can work stable in500A. 5.Film thickness control instrument:American Inficon SQC-310 Quartz crystal single probe control system，which can used for coating multilayer film. 6.Vacuum chamber heated by electric heating tube, which can realize automatic control temperature. 7.Equipment base use merchant steel made, surface spray paint, open the door, beautiful decoration. 8.Inflation system:Equip 2 path“Japan Yamatake”mass flowmeter（Imported from Japan），Flow control range:8～200SCCM； 9.Cryogenic system：TH-135-32A one set. 10.One set hall ion source.

Optical Coater can coat multi-layers on viewing window or spectrum element that applied to optical instruments optical lens. It is suitable for coating antireflection coating, optical filter, multicolor, red, yellow, green and blue on optics lens, electronics, acrylic, glass, lamps, mobile viewing window, glasses, lighting. Optical coating equipment can be plated layers more short pass, long wave pass, antireflection film, reflective film, filter membrane, beam splitter, a bandpass film, dielectric film, high anti-film, color reflective film various film system , can achieve 0-99 layer film coating film system, but also to meet the requirements as automotive reflective coating glass, binoculars, glasses, optical lens, cold cups and other products. Configure different evaporation sources, electron gun and ion source and a variety of film thickness meter can be plated Department of metals, oxides, compounds and other high melting membrane deposition, and super-hard coating on the glass surface. Acceptance Process: After machine making , Seller will inform buyer to come to factory to check, at that time it can be testing for coating sample , in user factory as the final checking. Seller must install , testing on time and on the quality .After the whole machine be installed , tested , please buyer depend on the technology agreement and acceptance criteria. 1.Installation: The supplier should send engineers to buyer’s factory and help installation, commissioning and support of the production process. The round tickets, room and food should be to be paid by buyer. The buyer should assist and cooperate when needed. 2.Traning:during installation , operator and maintenance man must full participate .supplier will provide traning in the locale including daily operation , maintenance , operation problem analyze and process of urgency. 3.After sale service: One year guarantee , it will offer the best service in the guarantee or past guarantee .