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  4. Sensors 3 Products available
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Other Products / Services #4532997

Autotuning Of RF Power

During the plasma process the autotune facility ensures that the RF power is automatically impedance-matched to any variation in the system or loading. This means that RFplasma conditions in the chamber are maintained at their optimum - important as it gives faster reaction times, greater reproducibility of results and protects the power supply during the RF cycle.
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Touch-screen Control

At the operational heart of the Q300T ES is a colour touch screen which allows users to rapidly enter and store their own process data. A range of typical sputtering and evaporation profiles are pre-installed. The Q300T ES uses an 'Intelligent' recognition system that automatically detects the type of coating insert fitted and "becomes" either a evaporator, carbon coater or sputter coater. https:www.quorumtech.comquorum-productq300t-es-large-chamber-turbo-pumped-evaporatorsputter-coater
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Rapid Data Entry Services

At the operational heart of the Q150R is a simple colour touch screen, which allows the most inexperienced or occasional operator to rapidly enter and store their own process data. For convenience a number of typical sputtering and carbon coating profiles are already stored.
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Single Port

Where SEM geometry allows, both the cryo preparation chamber and the SEM cooling system can be fitted to a single chamber port (the minimum port diameter is 38 mm). This gives a tidy installation and frees up a valuable chamber port.
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Rf Plasma Etchers

RF plasma allows the low-temperature modification of a wide range of specimens and substrates. Plasma etching is generally confined to the semiconductor industry, were the Quorum K1050X can be used to remove silicon layers using reactive gases, such as CF4 and for the removal of photoresist using oxygen. Plasma ashing refers to the controlled, low-temperature removal of organic material using oxygen or air and has applications across many areas of research and quality control. RF plasma can also be used for the surface modification of plastics and polymers - and for cleaning TEM and SEM specimens and specimen holders.
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EVACTRON E50 Plasma Cleaner

Ultra High Vacuum (UHV) Available for Open Flow and for Cryogen-Free Closed Cycle interfaces. Cool to 4K or bake to 1000K without damage.
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Controlled Pulse

Installed as standard on E and ES models, controlled profiles ensure carbon is evaporated in short pulses. This significantly reduces or eliminates the amount debris (large carbon fragments) associated with traditional carbon "flash" evaporation. Plus it allows carbon cord evaporation to be accurately controlled using the optional film thickness monitor (FTM) accessory.
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Recirculating Heater

  • Specification Temperature range (ºC) -15º to +70ºC, -20º to +70ºC, 20º to +70ºC, -15º to +70ºC.
The E4800 Series of Recirculating HeatersChillers are recommended for a wide range of open and closed-loop temperature control applications. The E4860 is an option for the E3100 and K850MW critical point dryers.
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EVACTRON ZEPHYR Chambers

Desktop controller, SEMFIB chambers or load locks, 2 operating regimes, classic mode (roughing pressures), T-pump mode (turbomolecular pressures), .!!
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Soft-clean Plasma Cleaning Chamber

Windows and Android GUI software, Optional Safar side loaders (US 8, 716, 676 B2), Accommodates up to three TEM stage rods, Cleans SEMTEM samples and SEM chambers from one desktop controller, Stores samples and parts after cleaning, Uses patented Safar TEM side loaders.
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COMBICLEAN SYSTEM

Cleans SEMTEM samples and SEM chambers from one desktop controller, Stores samples and parts after cleaning, Uses patented Safar TEM side loaders.
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Pneumatic Shutter Actuator

  • Brand Name Moorfield
  • Product code MOR_03-0011
Pneumatic Shutter Actuator Pneumatically driven mechanical shutter actuator with 180 action and connections for 6 mm OD tubing
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Shutter Kit

  • Brand Name Moorfield
  • Product code MOR_03-0017
Kit for pneumatically-actuated shutter system, contains shutter bladearmshaft, feedthrough, pneumatic actuator and couplers (SPECIFY DESIRED BLADE, ARM AND SHAFT DIMENSIONS AT CHECKOUT)
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COUPLING KIT

  • Brand Name Moorfield
  • Product code MOR_03-0009
Kit for air-side coupling of actuator and feedthrough shafts, includes actuator mounting bracket and coupling sleeve
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Dc Power

  • Brand Name Moorfield
  • Product code MOR_03-0018
Kit for DC-power actuated shutter system, contains shutter bladearmshaft, feedthrough, DC power actuator, and couplers (SPECIFY DESIRED BLADE, ARM AND SHAFT DIMENSIONS AT CHECKOUT)
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Throttle Valve

  • Brand Name Moorfield
  • Product code MOR_03-0035
Throttle valve for mounting on ISO-160 ports, constructed from aluminium blade and body, SS shaft, PTFE bushes and o-ring seals. Not designed for use as a shutoff valve. Ideal for use in cases where sputtering or any relatively high-pressure vacuum process is required, or in any situation where gas flow throttling is required to prevent pump stalling. Here the use of throttle valves is also advantageous through reductions to the quantities of process gases required. The basic valve is operated operated manually. Alternatively, we can fit them with electrical motors or pneumatic components for DC or pneumatic valve actuation, respectively (SELECT APPROPRIATE OPTION BELOW). With such automated actuation, the valve moves between fully open and a mechanically defined setpoint.
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Thermal Evaporation Source

  • Brand Name Moorfield
  • Product code 03-1942
Triple thermal evaporation source with water-cooled feedthroughs. Suitable for accepting industry-standard boat, basket or filament sources. Short or long power legs. Available in radial or linear geometries (radial version shown). Rated for 100 A maximum current.
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Bell Jar

Bell jar chamber for E306 coater, made from borosilicate glass, 305-315 mm inner diameter, 355 mm height
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Thermal Evaporation Controller

  • Brand Name Moorfield
  • Product code 03-1948
TEC-4CDA four-channel co-deposition thermal evaporation controller. Can be used for operation of up to two sources simultaneously. Compatible with most R&D thermal evaporation sources. Manual or automatic contol (automatic control is via a 0-10 V analogue input and source selection relays on the unit's back panel). Optionally available with complete transformer circuit and cable set for power delivery.
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Vacuum Oscillator

  • Brand Name MMC
  • Product code 800-090
In-vacuum oscillator (MicroDot connections, specify length) with coiled cooling tube on 1" bolt feedthrough, welded assembly, includes 2 in-vacuum cables
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Sensor Connection

  • Brand Name MMC
  • Product code 400-017
2 34" CF (NW40CF) feedthrough with 1 sensor connection (BNC air-side to MicroDot), 2 cooling tubes (316" dia.) and 1 rotary feedthough (316" shaft)
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RPMBlue Photoluminescence Mapping System

The RPMBlue is the industry standard high-volume, production oriented photoluminescence mapping system. By tuning the system capabilities to your control and measurement needs for the production line, the system becomes fast and economical. It can be fitted with up to two internal and one external excitation lasers, which are typically selected according to the bandgap of your material. Three different gratings are available to match the PL wavelength and thickness fringe range. It accommodates 2 to 6 diameter wafers standard. Certain 8 wafers can be loaded as well. Robotic loading from up to 3 cassette stations is a standard option. Typical applications are peak and dominant wavelength, FWHM, PL intensity, film thickness, and surface roughness monitoring of LED, Laser, high power high frequency device epi-structures, and many other applications based on compound semiconductors.
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Bolt Baseplate

  • Brand Name Moorfield
  • Product code MOR_03-0031
1" bolt baseplate feedthrough with adaptor for 34" dia. compression quickfit fitting, complete kit contains 1" bolt baseplate feedthrough (SS-304 for durable thread), compression screw, brass compression bush and washer, and o-ring. This kit is specially designed for making positive earth connections to sputtering magnetrons via vacuum chambers. Suitable for use with all magnetrons with 34" diameter shafts, e.g., Lesker Torus, Moorfield Magitron, and models from AJA and Angstrom Sciences.
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Vacuum-Side Shutter Kit

  • Brand Name Moorfield
  • Product code MOR_03-0021
Vacuum-side shutter kit containing shutter blade, arm and shaft, and attachment parts (SPECIFY DESIRED BLADE, ARM AND SHAFT DIMENSIONS AT CHECKOUT)
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Heater Assembly Ceramic

  • Brand Name Moorfield
  • Product code 03-1969
Kit contains: Ceramic heater element support plate, ceramic substrate support top piece. Allows for replacing ceramic top and bottom pieces of nanoCVD-8G heater stage.
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Heater Assembly Power

  • Brand Name Moorfiled
  • Product code 03-1968
Kit contains: Carbon-carbon composite heater element, ceramic bolts 2, ceramic bush x 2, power legs 2, graphite washers 2. Allows for rebuild of power delivery section of nanoCVD-8G heater stage.
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Box Shielding Kit

  • Brand Name Moorfield
  • Product code 03-1938
Stainless-steel box shielding kit for TE1 source. Shielding allows for efficient power usage and restricted stray depositionIR. (Image shows shielding fitted to TE1 source.)
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Low-temperature Evaporation Source

  • Brand Name Moorfield
  • Product code 03-1953
Designed for fine temperature (80600 C) and deposition rate control, Moorfield LTE sources are ideal for vacuum deposition of organic materials. For best performance, use together with a source shutter. Fitted with K-type thermocouple and quartz crucible as standard. 15 CC crucible capacity; 5 CC suggested charge volume. UHV-compatible and with multiple mountings options.
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Magnetron

  • Product code 03-1965
  • Brand Name Moorfiled
High-vacuum magnetron sputtering head for industry-standard 4" diameter targets. Accepts target thicknesses from 116" to 14". Easy target replacement and maintenance. Available with or without FlexiHead mounting for variable head angle and in-chamber height-adjustment (image shows model with FlexiHead option). Provided with tube stub for 1" bolt baseplate feedthroughs as standard. Also available flange-mounted. Water-cooled and suitable for accepting RF, DC or pulsed DC power.
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Replacement Heater Assembly

  • Brand Name Moorfiled
  • Product code 03-1970
Allows for complete rebuild of nanoCVD heater stage. Kit contains: Carbon-carbon composite heater element, ceramic bolts 2, ceramic bush x 2, power legs 2, graphite washers 2. Ceramic heater element support plate, ceramic substrate support top piece.
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Manual Actuation

  • Brand Name Moorfield
  • Product code MOR_03-0016
Kit for manually-actuated shutter system, contains shutter bladearmshaft, feedthrough and couplers (SPECIFY DESIRED BLADE, ARM AND SHAFT DIMENSIONS AT CHECKOUT)
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Dual Channel Power Supply

  • Brand Name Moorfield
  • Product code 03-1960
Dual-channel power supply and controller for LTE sources, co-deposition capable. Allows for manual control of source power or temperature, and also offers 0-10 V signal input for external control (e.g., from deposition rate controller). Rack-mount or standalone unit. Suitable for sequential or co-deposition operation of up to 2 LTE sources.
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LTE Sources

  • Brand Name Moorfield
  • Product code 03-1959
Four-channel power supply and controller for LTE sources. Allows for manual control of source power or temperature, and also offers 0-10 V signal input for external control (e.g., from deposition rate controller). Rack-mount or standalone unit. Suitable for sequential operation of up to four LTE sources.
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The Stinger Cooling System

Modular closed cycle cooling system that can be used for multiple experiments. Build a cryohead based on your unique needs.
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Cylinder Chamber

  • Brand Name Moorfield
  • Product code MOR_03-0030
Cylinder chamber for E306 coater, made from borosilicate glass, 305-315 mm inner diameter, 365 mm height
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TEM Prep Slusher

Offers an easy and convenient way of transporting pre-frozen specimens to and from the PP3010T Conveniently locates into the Prepdek workstation of the PP3010TFreely transportable, e.g. between high pressure freezer, cryoultramicrotome and the PP3010TIdeal for loadingunloading TEM grids and grid holdersTilting holder for cryo shuttles (holders). Allows the easy transfer of specimens from external freezers (e.g. high pressure, jet, slam etc) Option for PP3010T and previous PP3000T and PP2000PP2000T models.
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Minilab

The MiniLab range from Moorfield: Flexible, modular PVD systems for high-quality R&D and pilot-scale production. MiniLab systems provide superior high-vacuum coating performance. All systems have modular designs, providing the flexibility to address a huge range of customer requirements. The range contains several platforms (see below), with each having a distinct chamber volume and shape. While all chambers are built to the same high standards, larger chambers allow for more techniques and flexibility than their smaller counterparts. In addition to thin-film deposition, MiniLab systems can also be fitted with complementary techniques such as ion beam sources, etching components and annealing stages. We specialise in custom solutions! Call us to discuss your needs today.
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NanoPVD Deposition Systems

The nanoPVD series of deposition systems. Compact and suitable for benchtop locationbut not to be confused with microscopy-related productsnanoPVD system design is derived from proven R&D thin-film system technology such as that used in our flagship MiniLab range. Developed in collaboration with leading academic groups, nanoPVD tools are optimised for ease of use, represent outstanding value for money and are ideal where available space and budgets are key considerationswithout compromising on quality of results. The nanoPVD range now consists of multiple models covering both magnetron sputtering and thermal evaporation deposition techniques. For further details, see the links at the bottom of this page.
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M307 Moorfield

  • Features Modular design, Glass bell-jar or box-type stainless-steel chambers, Turbomolecular pumping systems, Base pressures <5 × 10-7 mbar, Metals and organics deposition Etc.
The M307 is a floor-standing evaporation tool optimised for uniform deposition onto substrates with maximum diameters of 6, and is capable of standard thermal evaporation for metals and low temperature evaporation (LTE) for organics. All power supplies and controller units are fully integrated within the system electronics rack. The vacuum chamber is a glass bell-jar, and is fitted with removable deposition shielding for minimised cross-contamination. The pumping system is based on a turbomolecular pump, with both rotary and scroll-type backing pumps available. The M307 is an extremely compact system optimised for ease of use but without compromising the film qualities provided. It represents outstanding value for money. It even has its own on-board water-cooling system making installation a simple task.
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Edwards E306 Thermal Evaporators

We can work with most system configurations, including units set up for thermal or e-beam evaporation, and magnetron sputtering. Edwards E306 Thermal We can provide standard Edwards layouts available including 1, 2 or 3 boat configurations with interspaced shielding. 4 boat TE4 with optional co-deposition mode. Replacement thermal control systems either console or 19" rack-mount based.
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NanoETCH Tool

  • Features Benchtop configuration Soft-etching technology: Precision RF power <30 W MFC-controlled process gases Up to 6” diameter stages Fully automatic operation via touchscreen HMI.
The nanoETCH supplies process gas through MFCs. These, along with all other hardware, are controlled manually or automatically (recipe-based) via the touchscreen HMI. The system can be connected to a PC for data-logging. The nanoETCH tool is now installed in leading graphene2D material research labs, including ICFO (Spain), the Cambridge Graphene Centre and the UK National Graphene Institute.
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Work Chamber

The borosilicate glass work chamber is 250 mm diameter x 300 mm high and mounted on an aluminium support collar. A tough chamber implosion guard is included as standard. The chamber can accommodate specimens up to 8"200 mm in diameter. A unique rack-out specimen loading system gives the user easy specimen access and the hinged lid assembly makes other areas of the vacuum chamber readily accessible.
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Precision Horizontal Diamond Wire Saw

The sample can be positioned inside the loop thereby allowing for accurate positioning prior to and viewing of the sample during the cutting process. The sample holder is attached to a counter-balanced arm that uses weights to establish and maintain the proper amount of force throughout the entire cut or slice. Tensioning of the wire is also accomplished through the use of weights. This saw allows the use of particularly thin diameter wire (down to 0.08 mm). Very often users choose to mount a microscope on the saw so that accurate positioning of the diamond wire can more readily be accomplished or to watch the cut or slice while in progress. A precision micrometer is supplied as standard equipment to facilitate fast and accurate positioning of the sample. The Precision Diamond Wire Sawhorizontal construction. The samplefeed by a table using gravity andespecially suitable for small samplesneeding sensitive adjustments. The Precision Diamond Wire Sawhorizontal construction. The samplefeed by a table using gravity andespecially suitable for small samplesneeding sensitive adjustments.
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Sputter Coaters

  • Features 57 mm diameter disc-style (no backing plate), Oxidising metals available for Quorum turbo-pumped coaters (including Q150T and Q300T.Etc
Disc-style (57 mm) sputtering targets for current q series of coaters and sc7620. Also for many old models, including k575, k575x, e5000, e5200, e5400, and previous models using the same style of puttering target. See: ordering information for more details.
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Annular Sputtering

  • Features Annular style sputtering targets (81 mm OD, 60 mm ID), Mounted on a threaded backing plate Etc.
Coating systems using this style of target were designed to sputter non-oxidising metals only. For sputtering oxidising and non-oxidising metals,
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Coolstage

  • Specifications Specimen size. 10 mm Ø (adaptor stub for 12 Hitachi stubs can be supplied on request), Stage temperature range. Higher vacuum will allow for cooler temperatures, compatible with high vacuum levels to 1 x 10-5 Pa. Etc.
The Coolstage is a Peltier-driven SEM cooling stage for scanning electron microscopy (SEM), low vacuum (LV) or variable pressure (VP) applications. The stage can be cooled to sub-zero temperatures for specimens that may be sensitive at ambient temperature, subject to beam damage, or may otherwise sublime (lose water) at ambient temperatures.
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Rapid Specimen Exchange

To exchange a specimen it is necessary to increase the specimen stage temperature to ensure that condensation does not form on the specimen or specimen stage. The keypad controller has a convenient exchange button that will automatically take the specimen holder temperature to a programmable temperature from between +5C to +20C. Typical cooling and heating rates are up to 30C per minute.
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SEM Preparation Systems

  • features Cryo workflow options
The PP3010T is a highly automated, easy to use, column-mounted, gas-cooled cryo preparation system suitable for most makes and models of SEM, FE-SEM and FIBSEM.
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Vacuum Monitoring System

RF power of up to 100 W at 13.56 MHz is available and can be infinitely controlled and pre-set to required values. Automatic tuning of forward and reflected power is standard and shown on the digital display.
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Specimen Stub

Specimen stubs with surface slots, holes and a flat area - useful for most specimen types. Blank and slotted stubs are also included. In addition a range of optional holders is available, including shuttles for large specimens and top-loading holders for high pressure freezing, TEM Autogridstm (for cryo-FIBSEM applications) and clamping shuttles for hard specimens.
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  • Chandan Sharma (Harley Instruments)
  • Plot No. 4, Survey No. 47, Sameer Apartment, Off Pune Satara Road, Maharashtra - 411009, India
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