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Usage
Semiconductor Process Tools
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Performance
Consistent And Reliable
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Maintenance
Zero Maintenance
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Installation Count
Over 166, 000 Installations Worldwide
For a consistent, reliable performance and zero maintenance, you can rely on Edwards STP Maglev Turbomolecular Pumps to deliver every time. Our first STP Maglev Turbomolecular Pumps were sold in 1983, we now have over 166, 000 installations worldwide. 85% are operating on semiconductor process tools, where they demonstrate exceptional levels of performance and reliability. STP Maglev Turbomolecular Pumps are the first choice for applications demanding high up-time, hydrocarbon-free pumping, minimal maintenance and low vibration. The rotor is entirely suspended by magnetic bearings so all contact between the rotor and the remainder of the pump is eliminated. As well as giving very low vibration, the elimination of contact means no bearing contact when rotor is rotated and no requirement for consequent pump maintenance.