Aerotech, Inc.

• Model NumberALS10010
• Pitch and Yaw6 arc sec
• Travel100 mm

Design Features Direct-drive linear motor for ultra-precise motion Long-life linear motion guide bearing system Two-axis internal cable management system Sealed design with optional air purge Low-cost, small footprint, high-performance stage The ALS1000 is a compact, high-performance stage that is as accurate as it is versatile. It provides a small cross section, cost-effective alternative for precision applications where a small footprint and environmental protection are required. A linear motion guide bearing system, two-axis internal cable management and high-performance brushless servomotor make the ALS1000 the stage of choice in industrial applications such as laser machining, medical component manufacturing and other applications requiring high accuracy in a production environment. Construction Features Sealed linear motion guide bearings with integral wipers are incorporated to provide excellent payload capability and long life. Both the metal waycover and tabletop are treated with a hardcoat (Rockwell 62 hardness) that is scratch-resistant and provides outstanding protection in the harshest applications. An optional air-purge fitting is available that allows air to be forced into the body of the stage to create a positive internal pressure that resists particulates from entering the stage. The tabletop utilizes stainless steel Helicoil™ inserts to protect mounting holes against thread wear. Optional stage finishes are available, including electroless nickel plating. Linear Motor Drive Aerotech’s high-power, cog-free, BLMC series linear motor drives the ALS1000. The non-magnetic forcer coil provides high force with zero cogging for super-smooth velocity and position control. This zero cogging design is ideal for applications requiring outstanding contour accuracy and smooth velocity profiling. As with all of Aerotech’s ALS series linear motor stages, the linear motor has zero backlash, no windup, zero friction and outstanding system responsiveness. The magnetic field of the linear motor is totally self-contained within the U-channel design. Most high-performance applications cannot tolerate the stray magnetic fields generated by flat motor magnet tracks. Cable Management System Extensive R & D has resulted in an optimized cable management system (CMS) that is designed for millions of cycles of maintenance-free operation. In single- and two-axis systems, the CMS is completely internal to the stages, providing a turnkey system. External CMS is available for three-axis systems. Custom configurations are common and are readily available. High Performance Noncontact linear encoders with micron-level repeatabilities are standard on all ALS1000 series stages. Either a line-driver output or amplified sine-wave output encoder is available. Motor power and feedback signals terminate in the stage endplate allowing for a simple, clean interface. The optional HALAR factory calibration further increases the standard accuracy and repeatability. Aerotech manufactures a wide range of matching drives and controls to provide a fully integrated and optimized motion solution.

• Model NumberPRO280LM
• Travel300
• Roll49 μrad (10.1 arc sec)
• Stage Mass51.7 kg

Design Features Improved second-generation design Rugged mechanical construction High-performance in a cost-effective package Direct-drive linear motor for ultra-precise motion Eight models with travels from 300 mm to 1500 mm Vacuum and cleanroom versions available Available with ThermoCompTM for high-performance in changing environments The PRO280LM is part of Aerotech’s second-generation PRO-LM stage series with many improvements and added features. Enhanced positioning specifications, improved stiffness, and competitive pricing make the PRO280LM stage the ideal choice for both medium and high-performance production applications. The PRO280LM design provides a good alternative to the PRO225LM for applications requiring higher stiffness, higher load capacity, or longer linear travels. Rugged Mechanical Construction A long-life recirculating linear guide bearing system and a low-friction sealing solution make the PRO280LM an attractive solution for industrial applications such as laser machining. The basic external construction of the PRO280LM design provides protection from debris while the side-seals prevent dirt and particulates from entering the stage. The curved hard-cover design provides a natural shape that prevents excessive debris from collecting on the stage. Precision Motion Performance The PRO280LM series stages are optimized with high-precision, noncontact linear encoders that are protected from debris by the stage sealing system. Precision recirculating linear bearings along with machining and assembly craftsmanship enable excellent geometric performance specifications. Incremental and absolute encoders are available as standard options and enable minimum incremental motion down to 5 nm and sub-micrometer repeatability. The optional HALAR factory calibration improves positioning accuracy down to ±1 μm. Accurate Positioning with ThermoComp Temperature changes and thermal effects are some of the largest error sources in precision machines. All PRO series stages are available with Aerotech’s ThermoComp feature, an embedded temperature compensation unit that guarantees accurate positioning in variable temperature environments. Using this feature protects your process from real-world conditions, even in extreme industrial settings. Direct-Drive Linear Motor Aerotech’s high-power U-channel linear motors drive the PRO280LM. The ironless forcer coil provides high force with zero cogging for super-smooth velocity and position control. This ironless design is ideal for applications requiring outstanding contour accuracy and smooth velocity profiling. As with all Aerotech linear motor stages, the linear motor has zero backlash, no windup, zero friction, and excellent dynamic responsiveness. Design and Integration Flexibility The PRO280LM is designed with many standard features and options that make the design incredibly flexible and allow it to be easily tailored to a specific application. The PRO280LM is available in eight different models with travels ranging from 300 mm to 1500 mm and speeds up to 2 ms. Configurable cable management solutions are available for single and multi-axis systems as standard options. The base mounting holes are accessible from the outside of the stage allowing for easy mounting. Standard mounting holes for both English and metric optical tables are present in all travels. The tabletop is available with both English and metric mounting patterns and can be ordered with brush attachments to clear any debris that may collect on the stage hard cover. Tabletops with hole patterns that allow the direct attachment of Aerotech’s ADRS, ACS-LP, ADRT, ACS, and AGR rotary stages are also available. The PRO280LM series is also available with cleanroom preparation and vacuum versions.

• Model NumberABL10025
• ConstructionAluminum Body/Hardcoat
• Stage Mass4.5 kg
• Travel25 mm

Designed for high-performance alignment and assembly 0.5 nm closed-loop resolution Fully preloaded air-bearing Low-noise linear amplifiers Complete noncontact design Overview ABL1000 series stages are the highest performance miniature air-bearing stages available. Aerotech has combined our extensive precision motion control and positioning system experience with the latest technologies to produce a truly outstanding miniature, linear air-bearing stage. Linear Stage The linear positioner is a fully preloaded, noncontact design. Inherently frictionless, air bearings have proven to be the standard in precision applications and Aerotech has now produced a miniature version. Driven by a noncontact linear brushless servomotor, this stage proves the ultimate solution whether the application requires small, accurate steps or constant smooth velocity. Superior magnetic field and motor coil design result in the highest force output of any miniature air-bearing stage, with superior servo performance. Years of research have resulted in a robust and perturbation-free cable management system. Feedback and Control System A wide selection of state-of-the-art motion controllers is available, including the Automation 3200 software-based controller with digital drives and the Soloist and Ensemble stand-alone controllers. Options Convenient rack or panel-mount amplifiers are included with all systems. Aerotech's expert technical staff is experienced in custom system designs and will work with you to generate a system to meet the unique needs of your application.

• Model NumberANT95-L Series
• Accuracy±2.5 µm
• Maximum Speed500 mm/s
• Travel25 mm

Design Features Nanometer-level performance in a large travel format High resolution (1 nm), repeatability (75 nm) and accuracy (250 nm) In-position stability of