Ebara Technologies

EBARA Technologies, Inc. Pirani gauges offer wide measurement range of atmosphere to medium vacuum (5 e-4 Torr) in a compact package. EBARA Technologies, Inc. Pirani gauges are available with either KF or CF flanges and with or without process control setpoints.

• pump quantity1~8 units

EBARA's Dry Pump Integrated Gas Abatement System is a harmonized system between vacuum technology and abatement technology based upon EBARA’s best know-how. The system is designed in accordance with customer’s facility needs for customized integrated solutions.

• UNITmbar (Torr)
• EGPC550 Tungsten5 x 10-5 ...1500 (3.8x10-5 ...125)

Your complete solution for process measurement and control. Compatible to all active gauges, the Model EGC controllers can monitor the entire pressure range from 10-10 to 1500 mbar (10-10 to 1125 Torr) and the setpoint status

• Cooling systemWater cooling
• Weight, kg (lb)10 (22)

• Leak Rate:1x10-7 mbar L/sec (min)
• PTFE Media99% efficiency @ 0.3 micron

EBARA designs and manufactures application-specific filtration products capable of operating in harsh environments while safeguarding operators and mission critical equipment. The EBARA Reverse Pulse Filter integrates proven reverse pulse technology to extend maintenance intervals, resulting in increased run time, fewer element changes, and reduced maintenance costs.

EBARA's NDC are compact, magnetic pumps that transport and pressurize ultra-pure water and liquid chemicals to meet the requirements of the semiconductor and liquid-crystal manufacturing processes. Hydrodynamic bearings eliminate mechanical contact and the resulting particle emissions from the pump interior. Additionally, metallic ion elusion and pulsation have been virtually eliminated.

• Required air pressure Mpa0.4
• Pump discharge pressure, Mpa5, 10
• Discharge flow rate, mL50 (max)/stroke

• pressure range10-8 to 10-2

EBARA Technologies, Inc. PiraniIonization gauges combine the wide measurement range of a Pirani gauge with the high vacuum measurement range of a hot cathode ionization gauge. These gauges are usable from Atmospheric pressure all the way to ultra-high vacuum (5 e-10 Torr). The gauges can be controlled via rack mount power supplydisplay units or can be powered by the user while utilizing the gauge output or the optional gauge mounted display. EBARA Technologies, Inc. PiranIonization gauges are available with either KF or CF flanges.

• EGPC550 Tungsten5 x 10-5 ...1500 (3.8x10-5 ...125)
• UNITmbar (Torr)

• OZONE CONCENTRATION9.3
• RAW GAS FLOW RATE (SLM)2.5
• GAS PRESSURE AT DISCHARGE150 (21.7)

The ozonizer operates on the corona discharge principal (passing oxygen through an electric field of high potential) and employs a high performance trench discharger that differs from conventional ozone generator methods. The trench discharger is designed to have more surface area and is cooled by city water, creating large concentrations of ozone per unit discharge area.