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COMSOL Multiphysics Pvt. Ltd.
location MG Road, Bangalore, Karnataka

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Chemical Machine

Leading Manufacturer, Supplier & Retailer of Chemical Vapor Deposition System.

Chemical Vapor Deposition System

Chemical Vapor Deposition System
Chemical vapor deposition (CVD) allows a thin film to be grown on a substrate through molecules and molecular fragments adsorbing and reacting on a surface. This example illustrates the modeling of such a CVD reactor where triethyl-gallium first decomposes, and the reaction products along with arsine (AsH3) adsorb and react on a substrate to form GaAs layers.The CVD system is modeled using momentum, energy, and mass balances including a detailed description of the gas phase and adsorption kinetics. A reduced reaction scheme is compared to the full scheme in the Reaction Engineering interface.
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