Channel Detection Electron Multiplier (CDEM) for direct ion imaging and ion-induced secondary electron imaging. The geometry of the detector is optimized for imaging with the ion column resulting in excellent SignalNoise in ion imaging, as opposed to the Everhart Thornley SED which is optimized for SN in electron imaging.
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TK Oh (FEI Company)
8 Jalan Talipon, 10400 Penang, Malaysia, Malaysia
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