Economy Heaters are gases that condense or liquefy due toa phase shift at low temperatures. The condensation occurs in the gas line and puddles in the shower head before being injected into the vacuum chamber. A substantial number of wafer defects will occur if liquefied gases are injected into the vacuum chamber. Uniform heating of the lines will prevent condensation.
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Ratheesh (V-guard Industries Ltd)
42/962, Vennala High School Road, Vennala, Kochi -, Kerala - 682028, India
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