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Process Control Systems & Equipment

We are leaders in the market for providing best range of Flow Controllers and Mass Flow Controllers

Flow Controllers

The GE50A digitally-controlled mass flow controller is available with either RS485, Profibus, EtherCAT, or DeviceNet IO. The digital control electronics utilize the latest MKS control algorithms for fast and repeatable response to setpoint throughout the device control range. Typical response times are on the order of 500 milliseconds. Digital calibration yields 1% of setpoint accuracy on the calibration gas. IO protocols are designed to allow the GE50A to easily replace RS485 and DeviceNet versions of the MKS 1179A MFC with minor coding.A standard 3-inch footprint enables its use without modifying existing gas line configurations. The GE50A incorporates few elastomers - only one external elastomer seal and elastomer valve plug. All wetted surfaces are metal. The GE50A comes standard with Viton seals or optional Buna, Neoprene or Kalrez to support different gas requirements.
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Mass Flow Controllers

mass flow controller instruments measure and control the flow of critical gases in a wide variety of applications, such as semiconductor manufacturing, optical coatings and flat panel display manufacturing.Mass Flow Controllers (MFCs) and Mass Flow Meters (MFMs) from MKS Instruments are available with either analog or digital communication, and with elastomer or metal seals. Analog mass flow controllers and mass flow meters are ideal for basic applications, offering high performance in a simple and cost effective package. Digital mass flow controller and mass flow meter devices offer several advantages over analog mass flow controllers and mass flow meters improved diagnostic capabilities, multi-gas capability in a single package and multi-range capability for reduced spares requirement and overall lower cost of ownership.
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