Nano Research Elements - Chocolate Snack

products specification

silicon wafer 2 3 4 5 6 8

size (inch)

diameter 50.80.3 76.20.3 1000.5 1270.5 1540.5 2000.5

(mm )

growth cz/fz as requirements

method

grade prime / test / dummy grade

thickness 180-1000 um (+/-25) as required

orientation 100 / 110 / 111

type n-type/p-type as requirements

dopant p-type: boron

n-type: phosphorous/antimony/arsenic

particle 30 @0.3um

oxygen 18 new ppma

content

carbon 1 new ppma

content

resistivity 1-10ohm/cm

others ttv15um, bow65um, warp65um

surface single side polished/double side polished