Nano Science and Technology Company

Dadri, Gautam Buddha Nagar, Uttar Pradesh

Technical parameters:

Chamber material : High purity quartz

Chamber size : Diameter 150 mm; Length 270 mm

RF power supply

Power supply features

The power supply is an all-solid-state RF power supply, and adopts a high-stability and high-reliability power amplifier module and a DC module, which effectively ensures the RF power output of the power supply. High quality electronic components are used to ensure the reliability of the products.

Power advantage

1. Long time normal operation. 2. Simple and flexible operation. 3. High power supply efficiency and low heat generation. 4. With perfect reflection power protection function.

RF power: 0100W/300W/500W/1000W continuously adjustable

RF connector : N type connector

Signal frequency : 40KHz/13.56MHz 0.005%

Machine efficiency : 75%

Reflected power : 100W

Harmonic component : -50 dB

Power stability : 0.1%

cooling method : Forced air cooling

Gas measurement : Measuring unit

Float flowmeter :

A channel range :10 100ml

Gas channel :Two channels

B channel range :16 160ml

Vacuum Measurement : Digital vacuum gauge (resistance gauge) display on HMI

Motor noise :56dB

Vacuum pump : Two-stage rotary vane vacuum pump

Pipe interface :

Gas inlet: KF16 exhaust port KF16

Motor Power : 230V 50 Hz: Single Phase

Connecting pipe :KF16 vacuum bellows

Pumping rate : 50 Hz: 15m3/hr; 250 LPM

Vacuum valve : Solenoid valve

Vacuum range : 0.001mbar1024 mbar

Motor Power : 400W

Ultimate vacuum : 0.001 mbar

Other

Power supply : AC220V 50/60Hz

Working vacuum : 40Pa

Total power : 550W/600W

Overall size : 600mm500mm560mm

Operating temperature : -10 - 40

Total Weight : 80kg (with packaging)

ATMOSPHERIC PLASMA SURFACE TREATMENT INSTRUMENT is an excellent tool for cleaning wafer surface before epitaxial or optical fiber before welding to obtain higher quality. This device also may be used for studying atmosphere pressure CVD.

Atmospheric plasma surface treatment instrument main features:

• High speed surface treatment with simple and safe operation
• Neither vacuum  nor chamber required with versatile plasma chemistry
• Handheld or in-line processing at low cost
• Light weight and compact size

Warranty & Certificate

• One year limited with lifetime support
• CE certified

Application Notes

• This Atmospheric Plasma Jet-Flow system is excellent to clean plastic, polymer and oxide substrate surface before coating
• This device also may be used for studying atmospheric pressure CVD.

PLASMA CLEANER 5L

Featrues:

• Environmental technologies: plasma process is the role of gas – solid coherent reactor consumes no water resources, no need to add chemicals and no environmental pollution.
• Wide adaptability: regardless of processing substrate type, such as metals, semiconductors, oxides, and most.

Applications

• Car industry: ignition coil engine oil seal film
• Defense industry: Aerospace electrical connectors, Kevlar deal
• Electronics industry: hard plastic parts, earphone, Cell phone cover
• Medical industry: intravenous infusion, catheter treatment
• Textile fiber, rubber and plastic industry and etc.