“oxygen Plasma Cleaner” (40KHz/13.56MHz) (100W/300W/500W/1000W)

Technical parameters:

\r

Chamber material : High purity quartz

\r

Chamber size : Diameter 150 mm; Length 270 mm

\r

RF power supply

\r

Power supply features

\r

The power supply is an all-solid-state RF power supply, and adopts a high-stability and high-reliability power amplifier module and a DC module, which effectively ensures the RF power output of the power supply. High quality electronic components are used to ensure the reliability of the products.

\r

Power advantage

\r

1. Long time normal operation. 2. Simple and flexible operation. 3. High power supply efficiency and low heat generation. 4. With perfect reflection power protection function.

\r

RF power: 0~100W/300W/500W/1000W continuously adjustable

\r

RF connector : N type connector

\r

Signal frequency : 40KHz/13.56MHz ±0.005%

\r

Machine efficiency : ≥75%

\r

Reflected power : ≤100W

\r

Harmonic component : ≤-50 dB

\r

Power stability : ±0.1%

\r

cooling method : Forced air cooling

\r

Gas measurement : Measuring unit

\r

Float flowmeter :

\r

A channel range :10～ 100ml

\r

Gas channel :Two channels

\r

B channel range :16～ 160ml

\r

Vacuum Measurement : Digital vacuum gauge (resistance gauge) display on HMI

\r

Motor noise :≤56dB

\r

Vacuum pump : Two-stage rotary vane vacuum pump

\r

Pipe interface :

\r

Gas inlet: KF16 exhaust port KF16

\r

Motor Power : 230V 50 Hz: Single Phase

\r

Connecting pipe :KF16 vacuum bellows

\r

Pumping rate : 50 Hz: 15m3/hr; 250 LPM

\r

Vacuum valve : Solenoid valve

\r

Vacuum range : 0.001mbar～1024 mbar

\r

Motor Power : 400W

\r

Ultimate vacuum : 0.001 mbar

\r

Other 

\r

Power supply : AC220V 50/60Hz

\r

Working vacuum : ≤40Pa

\r

Total power : 550W/600W

\r

Overall size : 600mm×500mm×560mm

\r

Operating temperature : -10℃ - 40℃

\r

Total Weight : 80kg (with packaging)