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    AeroBar Ionizing System

    • Green POWER ON, yellow COMMUNICATION, red ALARM2.9H x 2.8W x 12.4L in. (7.4H x 7.1W x 31.5L cm)
    • ISO 14644-1 Class 12.1H x 1.2W x 22.4, 28.4, 35.7, 44.4, 55.6, 64.4, 75.5, or 84.4L in.  (5.3H x 3.1W x 56.9, 72.1, 90.7, 112.8, 141.2, 163.6, 191.8, or 214.4 L cm)
    •  24 VAC, 50/60 Hz, 1W (typ), received from the Interface Module
    • Pulsed DC, Steady-state DC or standbySingle-crystal Silicon, replaceable
    • Supply TypeManufacturer, Exporter, Supplier, Retailer
    • Preferred Buyer Location All over the world
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    • calendar Member Since 14 Years
    • building Nature of Business Retailer

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    • 1.5 lb (1.02 kg) for a 22 in (56.9 cm) bar (approx. 6 oz per additional ft/0.17 kg per additional 30 cm) 
    • ISO 14644-1 Class 12.1H x 1.2W x 22.4, 28.4, 35.7, 44.4, 55.6, 64.4, 75.5, or 84.4L in.  (5.3H x 3.1W x 56.9, 72.1, 90.7, 112.8, 141.2, 163.6, 191.8, or 214.4 L cm)
    •  24 VAC, 50/60 Hz, 1W (typ), received from the Interface Module
    • Green POWER ON, yellow COMMUNICATION, red ALARM2.9H x 2.8W x 12.4L in. (7.4H x 7.1W x 31.5L cm)
    • Pulsed DC, Steady-state DC or standbySingle-crystal Silicon, replaceable
    • 24 VDC, 1.0A, ±5%Connect to up to six Model 5225 AeroBars

    Cleanroom Compatible for High Ion Output for Fast Neutralization

    Simco-Ion’s Model 5225 Digital AeroBar with Software Control is designed to handle the demanding requirements of in-tool ionization. With high ion output providing fast neutralization of electric charge on wafers, E78 compliance at the most stringent levels can be achieved.

    • Complete integration with tool control system
    • Fully adjustable parameters for each AeroBar
    • Ion current monitoring
    • Several lengths available including 3 specifically designed for EFEMs
    • Single-crystal silicon emitter points

    Interface Module Model 5200-IM6T

    Powers and supports up to 6 AeroBar Model 5225 Ionizers, FMS output.


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