Listing ID #3952686
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Contact SupplierAURIX dry, vapor-phase SAM coatings offer major advantages over traditional wet chemical coatings. In particular, the vacuum deposition environment eliminates issues of moisture variation, crucial in creating repeatable and robust surface coatings.
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Precision-tuned processes, with patented control, reduce the amounts of chemicals used, offer superior surface properties and improved surface energy control.
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With AURIX, SAM coatings can be created immediately following the release etching process. This enables the MEMS structure to be treated without breaking process-vacuum, maximizing yield.
Our results have consistently demonstrated superior film characteristics, with durability, coverage and yield, when compared with wet chemical approaches.