Capacitance Manometer

Setra’s VactronTM Model 760 capacitance manometer is
an absolute pressure transducer designed for accurate
and repeatable vacuum measurements. Various full scale
ranges are available from 10 Torr up to 1000 Torr. The units
of measurement may be specified in Torr, mBarhPa, or kPa.
The Model 760 operates from a ±15 VDC power supply and
provides a 0-10 VDC or 0-5 VDC signal output that is linear
with pressure and independent of gas composition. The
electrical connection can be either the industry standard 15
pin D-sub or 6 position terminal strip connector.
Setra’s VactronTM Sensor
The high accuracy VactronTM pressure sensor in the Model
760 is Setra’s patented variable capacitance technology.
A centrally located feed-through assembly supports a
circular electrode in close proximity to the back surface of
the diaphragm. Together, the electrode and diaphragm
form a variable capacitor within a small reference vacuum
chamber maintained at very low pressure. As the pressure
increases, the diaphragm deflects and the gap between the
electrode and diaphragm decreases, causing an increase
in the capacitance. This change in capacitance is detected
and converted to a highly accurate linear DC electronic
signal by Setra’s unique custom integrated circuit, which
utilizes a patented charge balance principle. Excellent zero
stability and barometric insensitivity are achieved through
an innovative sensor design.