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Contact SupplierCharacteristics: Max. travel range: 120um Sensor: LVDT Precision Machining Resolution: 10nm mass: 3.5kg
P93 could realize max stroke to 118μm. It could be equipped with LVDT sensor or CAP sensor. The sensor outputs 0~10V voltage signal corresponding to zero to full stroke of the stage.
Type | C/L-closed loop K-open loop | P93.X70C P93.X70L P93.X70K | P93.X100C P93.X100L P93.X100K | Units |
Travel range(0~120V) | 65 | 95 | μm±10% | |
Travel range(0~120V) | 81 | 118 | μm±10% | |
Integrated sensor | CAP/LVDT/- | CAP/LVDT/- |
| |
Resolution | 2.5/10/1 | 3.5/10/1 | nm | |
Closed-loop linearity | 0.05/0.1/- | 0.1/0.15/- | %F.S. | |
Repeatability | 0.03/0.05/- | 0.03/0.05/- | %F.S. | |
Pitch/yaw/roll | <15 | <20 | μrad | |
Push/pull force | 400/50 | 300/25 | N | |
Stiffness | 5 | 3 | N/μm±20% | |
Unloaded resonant frequency | 0.15 | 0.2 | kHz±20% | |
Unloaded step time | 10/7 | 30/7 | ms±20% | |
Load capacity | 20 | 20 | kg | |
El. capacitance | 15 | 15 | μF±20% | |
Material | é’¢ | é’¢ |
| |
Mass | 4000 | 3500 | g±5% | |
Operating temperature | CAP 10~50, LVDT 10~40, other -20~8 | ℃ | ||


