Main performance index
≤5×10-13Pa.m3s
Other detailed parameters
Parameter Name
Parameter Values
Outline dimension 550*460*304(L*W*H)
Voltage 220V50HZ, 10A
Run-up time <3 min(pump start time)
Leak detection mode Vacuum Suction gun
Display unit mbar.ls pa.m3s sccs sccm
Tracing gas He4He3H2
The suction gun model of minimum detectable leak rate: 5×10-13Pa.m3s