Mass Flow Controller TMFC30V

Model
TMFC30V
TMFC30A
TMFC50V
TMFC50A
Flow Range(N2)
10sccm~30SLM
10sccm~30SLM
10scc~50SLM
10scc~50SLM
Response Time
�1.0 sec
Accuracy
±1.0 % FS
Repeatability
±0.25 % FS
Proof Pressure
1300 PSIG
Leak rate
1 x 10-9 atm.cc/sec or less
Working temperature Range
0~50�
Materials of parts in contact w/gases
Body:SUS316
Valve seat:Vition�(Option Bura�or Kalrez�or Teflon�)
Joint
Standard:1/4 compression
Option: 1/8 compression,1/4 VCR�,3/8 Compression,VCR�
Electrical connections
Dsub 15-pin male connector per standards
Flow rate input signals
0~5 Vdc
4~20mA
0~5 Vdc
4~20mA
Flow rate output signals
0~5 Vdc
4~20mA
0~5 Vdc
4~20mA
required power supply
�15~28 Vdc/350mA