Micro Electro Mechanical Systems Sensors

MEMS (Micro-Electro-Mechanical Systems) sensors are miniature devices that integrate microscopic mechanical parts and microelectronics on a silicon chip. They detect and measure physical parameters such as acceleration, rotation, pressure, or sound, and convert them into electrical signals. 

MEMS Accelerometer – vibration sensor, tilt sensor, motion detection, inertial sensor

MEMS Gyroscope – angular velocity sensor, rotation measurement, IMU (inertial measurement unit)

MEMS Pressure Sensor – barometric sensor, duct pressure monitor, HVAC pressure transducer

MEMS Microphone – digital mic, acoustic sensor, sound level

MEMS Flow Sensor – airflow measurement, gas flow, microfluidic sensor

MEMS Temperature Sensor – micro thermal sensor, HVAC temp probe

Gyroscope (3-axis

Combined IMU (Accel + Gyro)

Pressure Sensor (low-range)

MEMS Microphone

Flow Sensor

HVAC duct monitoring

High-precision automotive/medical MEMS

calibration and rugged