Multi-processes CVD Vacuum Furnace, For This Vertical

To make such composites, a state-of-the-art furnace for Chemical Vapour Deposition Infiltration . This vertical, multi- layer vacuum coating furnace is meant to deposit silicon carbide coating on the substrate using methyl-try-chloro-silane as reactant and hydrogen as a carrying agent under suitable temperature and pressure. With minimum modifications, this CVDCVI vacuum furnace can also be used to deposit a wide range of materials such as boron nitride, hafnium carbide, tantalum carbide , silicon nitride and silicon dioxide