Listing ID #7313016
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Contact SupplierCUSTOMIZED 5 HEADS NST PLASMA MAGNETRON SPUTTERING COATER is particularly suitable for exploring solid electrolyte materials, combined by 5 different elements in 16 different ratios.This equipment is mainly used to make an oxide film on a single crystal substrate, so there is no need for a high vacuum environment.
Features | 5 magnetron sputtering guns for 5 different target materials Depending on the power supplies used (RF or DC), both metallic and non-metallic materials can be deposited. Capable of sputtering 5 target materials to produce various compositions via different sputtering times / rates With optional 5 power supplies, 5 target materials can be sputtered at the same time for combinatorial sputtering 16 samples can be deposited in one batch with a mask and a rotating sample holder |
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Input Power | Single phase 220 VAC, 50 / 60 Hz 1000 W (including vacuum pump and water chiller) |
Power Source | One 13.5 MHz,300 W auto-match RF generator is included and connected to the sputtering heads The rotatable switch can activate one sputtering head at a time. Sputtering heads can be switched “in the plasma” without breaking of vacuum during a multilayer process. Multiple RF power supplies are optional, which allows user to sputter multi-target at the same time for combinatorial sputtering Laptop with control software is available at extra cost to control each RF gun’s sputtering time and power |
Magnetron Sputtering Head | Five 1″ magnetron sputtering heads with water cooling jackets are included and inserted into quartz chamber via quick clamps One manually operated shutter is built on the flange One 10 L/min digitally controlled recirculating water chiller is included for cooling sputtering heads |
Sputtering Target | Target size requirement: 1″ diameter×1/8″ thickness max Sputtering distance range: 50 – 80 mm adjustable Sputtering angle range: 0 – 25° adjustable 1″ diameter Cu target and Al2O3 target are included for demo testing |
Vacuum Chamber |
Vacuum chamber is made of 304 stainless steel with reinforcing rib Inside vacuum chamber size: 470 mm L×445 mm D×522 mm H (~105 Liters, 18.5“×17.5″× 20.5″) Round 380 mm Dia. hinged type door with 150 mm Dia glass window Temperature range: -15 to 150 °C Vacuum level: 4.0E-5 torr with turbo pump |
Sample Holder |
150 mm diameter rotatable sample holder for coating 16 sample one one batch with different compositions Sample holder and mask rotation can be controlled manually by a button or automatically by a control software (Optional) The sample holder temperature is adjustable from RT to 600 °C max |
Vacuum Pump | KF40 vacuum port is built in for connecting to a vacuum pump. A compact turbo pump is included 4.0E-5 Torr with optional turbo pump |
Nano Science and Technology Company, founded by Mr Peeyush Dixit in 2013, has been a pioneer as a supplier and importer of multiple electronic and industrial uses chemicals in Gautam Buddha Nagar, Uttar Pradesh India. With a committed commitment to advantage and a customer-centric approach, we have established ourselves as a dependable name in both domestic and corporate sectors.
We recognize the importance of a clean and organized environment, be it at home or in the workplace. Our products are tailored to meet the exclusive requirements of each client, certifying the successful completion of all customer purposes. Whether it\'s Sputtering Systems, or Education and Research & Development areas, our team of skilled specialists is devoted to delivering top-notch results with efficiency and reliability.
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Vision: Our products must fulfill all the industrial requirements also, renowned for our commitment to excellence, innovation, and sustainability.
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Our service range
We are prominently providing reliable products like Muffle Furnaces, Vacuum Oven, Turbo Molecular Pump Station, Oxygen Plasma Cleaner, Lab Thin Film Coating System, Plasma Sputtering Coater, Thermal Evaporation Coater, Precision Temperature Controlled Hi-Vacuum Thermal Evaporating Coater etc.
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Why us?
Providing reliable and trustworthy products
Equipped with highly knowledgeable staff
Having multiple ranges of products
Transparent pricing structure
Providing online support as well