Engineered for FS 209 Class 100 (ISO Class 5) clean rooms with 100% Natural Polypropylene working chamber and chassis for zero metal contamination and ultra-low particle generation. Available in 8″ and 12″ (50 – 12,000 RPM) with ±1% RPM accuracy with multiple dispensing head options. Intuitive touchscreen UI with wireless mobile functionality offers real-time monitoring and unlimited recipe storage. Seamless, tool-less PP housing allows rapid wipe-down and resists aggressive solvents. Optional vacuum/vacuum-free chucks, Centering Tool, Liners, UV Curing, Infra-Red Heating, Wastage Collecting Containers and PC Software. Suitable for applications like Semiconductor lithography, MEMS & microsystems fabrication, OLED and display panel manufacturing, Optical coatings & sol-gel films.
Features:
Material & Chamber Construction- 100% Polypropylene Construction
- Fully non-metallic wetted path and chassis for zero metal contamination and ultra-low particle generation—ideal for FS 209 Class 100 (ISO Class 5) clean rooms
- Chemical-resistant all-polypropylene chassis
- Ø 8 ” Natural Polypropylene working chamber
- Multiple dispensing ports (edge-bead ready)
- Seamless polypropylene homopolymer molding—no joints, no dead zones, no leak paths
Substrate Handling & Processing Capability- Large-Format Processing
- Accommodates up to 150 mm substrates, plus multiple smaller dies in one run to maximize throughput in R&D and pilot production.
Chemical Resistance & Material Compatibility- Wide Chemical Compatibility
- 1 M HCl & NaOH Resistant — Impervious to strong acids and alkalis
- Solvent-Proof Construction — Compatible with acetone, toluene, isopropanol, and more
- Natural Polypropylene construction resists aggressive developers, strippers, acids, bases, and organic solvents without risk of leaching or corrosion—perfect for advanced resist, dielectric, and hybrid-material formulations.
Performance & Control- Precision Spin Control
- 50 – 12,000 RPM with ±1% RPM accuracy, programmable acceleration/deceleration, and ±1% thickness uniformity across the entire substrate.
Cleanroom & Glovebox Compatibility- Clean-Room-Grade Design
- Seamless, rounded interior surfaces for rapid wipe-down; tool-less, snap-fit covers; sealed electronics bay; and no metal fasteners in the processing chamber.
- Fits through Antechamber of glovebox*
- Remote operation from outside glovebox to ensure a comfortable operation for the user
- User Interface Tab can be fitted onto the Glove-Box wall (On request)
User Interface & Process Management- Integrated Recipe Management
- Integrated vacuum control and USB data-logging for process validation.
- Android™ touch UI, 10 steps per program
- Store up virtually unlimited recipes
- Live Graphical representation of RPM vs Time
Member Since 7 Years
Nature of Business Manufacturer
GST No. 33AAFCN3048K1ZG 
Address 2nd Floor, Heera Panna Complex, Gangai Karai Puram, T Nagar, Chennai, Tamil Nadu, 600017, IN
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