



Company Information
Ask for more detail from the seller
Contact SupplierCharacteristics: piezoelectric direct drive, variety of optional ,ravel range, quick response, x xy xyz p63.xyz is an ultra-high-performance piezo scanning system. Designed for afm, spm and nanomanipulation applications, it combines an ultra-low inertia, high-speed xyz piezo scanner with sgs feedback. On top of being extremely precise, the system is also small. Measuring only 30ã�30ã�42mmï¼�it is easy to integrate in any scanning apparatus.
P63 is a small-volume 1~3 axes piezo nanopositioning stage. It features ultra-precision and very compact. The size of XYZ version is only 30×30×42mm (only 30×30×21mm for X version) and is very easy to integrate into any scanning instrument.
P63 is an ultra-high precision nanopositioning system. It is designed for AFM, SPM, STM and other micro-scanning nano-operations.
Type | S-closed loop K-open loop | P63.X7S P63.X7K | P63.Z7S P63.Z7K | P63.XY7S P63.XY7K | P63.XZ7S P63.XZ7K | P63.XYZ7S P63.XYZ7K | Units |
Active axes | X | Z | X, Y | X, Z | X, Y, Z |
| |
Travel range(0~120V) | 5.5 | 5.5 | 5.5/axis | 5.5/axis | 5.5/axis | μm±10% | |
Travel range(0~150V) | 6.8 | 6.8 | 6.8/axis | 6.8/axis | 6.8/axis | μm±10% | |
Sensor | SGS/- | SGS/- | SGS/- | SGS/- | SGS/- |
| |
Closed/open-loop resolution | 0.2/0.1 | 0.2/0.1 | 0.2/0.1 | 0.2/0.1 | 0.2/0.1 | nm | |
Closed-loop linearity | 0.4/- | 0.4/- | 0.4/- | 0.4/- | 0.4/- | %F.S. | |
Repeatability | 0.2/- | 0.2/- | 0.2/- | 0.2/- | 0.2/- | %F.S. | |
Pitch/yaw/roll | <5 | <5 | <10 | <10 | <15 | µrad | |
Push/pull force capacity | 10/2 | 12/2 | 8/2 | 9/2 | 7/2 | N | |
Stiffness | 1.5 | 2 | X1.2/Y1.4 | X1.2/Z1.5 | X0.9/Y1/Z1.2 | N/μm±20% | |
Unloaded resonant frequency | 2 | 2.5 | X1.3/Y1.9 | X1.5/Z1.6 | X0.9/Y0.95/Z1.2 | kHz±20% | |
Closed/open-loop unloaded step time | 1.5/0.3 | 1.5/0.3 | 1.5/0.3 | 1.5/0.3 | 1.5/0.3 | ms±20% | |
Load capacity | 0.8 | 0.8 | 0.5 | 0.5 | 0.4 | kg | |
El. capacitance | 0.8 | 0.8 | 0.8/axis | 0.8/axis | 0.8/axis | μF±20% | |
Material | Aluminum | Aluminum | Aluminum | Aluminum | Aluminum |
| |
Mass | 70 | 70 | 120 | 120 | 160 | g±5% | |


