Automatic Electric Mass Flow Controllers, Power : 1-3kw

Mass Flow Controller

Performance Thori Mass Flow Controller Accuracy at calibration conditions after tare ±(2% F.S) Zero Shift and Span Shift ± 0.2% FS / °C Repeatability ± 0.5% Reading Long term drift 0.05% Full Scale / Year Operating Range / Turndown Ratio 0 : 25 

Maximum Controllable Flow Rate 102% Full Scale Typical Response Time 100 ms Warm-up Time 70 ms to full scale accuracy Valve Leak Specifications Internal (leak through) 10-5 atm – cc/sec He External (leak out) 10-9 atm – cc/sec He 

Operating Conditions Thori Mass Flow Controller Calibration Conditions 25°C, 14.696 psia Operating Temperature 0 to +50 ºCelsius Humidity Range (Non–Condensing) <90% Maximum Internal Pressure (Static) 100 PSIG 100 PSIG Proof Pressure 100 psig Vibration Nil. Mounting Attitude Sensitivity Yes. Valve Type Normally Closed Ingress Protection IP40 Wetted Materials Aluminium & Brass. 

Communications / Power Thori Mass Flow Controller Digital Input / Output Signal Via 4-20 mA Analog Input / Output Signal 0-5 Vdc Optional. Electrical Connection Options 9-pin male D-sub (DB9) Supply Voltage 10 to 30 Vdc or Works On Loop Power. Supply Current 200 mA 

Features Thori Mass Flow Controller 

Notes. 

Units calibrated with Air have built-in correction equations that allow you to use the gas select command to switch to Argon, Carbon Dioxide, Nitrogen, Oxygen, or Nitrous Oxide. 

Note: PFC-CC-1000 units that are set to Carbon Dioxide or Nitrous Oxide are limited to a maximum flow rate of 750 sccm instead of 1000 sccm due to the correction factor equations used for these gases. Note: PFCL020 units that are set to Carbon Dioxide or Nitrous Oxide are limited to a maximum flow rate of 15 slpm instead of 20 slpm due to the correction factor equations used for these gases. Note: Units calibrated with Hydrogen or Helium can function only with that gas. 

Model No Flow Range Min Flow Max Flow Accuracy PFC-CC-002 0 to 2 SCCM 0.1 SCCM 0 to 2 SCCM +/- 2 % PFC-CC-005 0 to 5 SCCM 0.1 SCCM 0 to 5 SCCM +/- 2 % PFC-CC-010 0 to 10 SCCM 0.1 SCCM 0 to 10 SCCM +/- 2 % PFC-CC-020 0 to 20 SCCM 0.1 SCCM 0 to 20 SCCM +/- 2 % PFC-CC-050 0 to 50 SCCM 0.1 SCCM 0 to 50 SCCM +/- 2 % PFC-CC-0100 0 to 100 SCCM 0.1 SCCM 0 to 100 SCCM +/- 2 % PFC-CC-0200 0 to 200 SCCM 0.1 SCCM 0 to 200 SCCM +/- 2 % PFC-CC-0250 0 to 250 SCCM 0.1 SCCM 0 to 250 SCCM +/- 2 % PFC-CC-0500 0 to 500 SCCM 0.1 SCCM 0 to 500 SCCM +/- 2 % PFC-CC-0750 0 to 750 SCCM 0.1 SCCM 0 to 750 SCCM +/- 2 % PFC-CC-1000 0 to 1000 SCCM 0.1 SCCM 0 to 1000 SCCM +/- 2 %      PFC-L-002 0 to 2 LPM 0.1 LPM 0 to 2 LPM +/- 2 % PFC-L-005 0 to 5  LPM 0.1 LPM 0 to 5 LPM +/- 2 % PFC-L-010 0 to 10  LPM 0.1 LPM 0 to 10 LPM +/- 2 % PFC-L-020 0 to 20  LPM 0.1 LPM 0 to 20 LPM +/- 2 % PFC-L-050 0 to 50  LPM 0.1 LPM 0 to 50 LPM +/- 2 % PFC-L-0100 0 to 100LPM 0.1 LPM 0 to 100 LPM +/- 2 % PFC-L-0200 0 to 200LPM 0.1 LPM 0 to 200 LPM +/- 2 % PFC-L-0250 0 to 250LPM 0.1 LPM 0 to 250 LPM +/- 2 % PFC-L-0500 0 to 500LPM 0.1 LPM 0 to 500 LPM +/- 2 % PFC-L-0750 0 to 750LPM 0.1 LPM 0 to 750 LPM +/- 2 % PFC-L-1000 0 to 1000LPM 0.1 LPM 0 to 1000LPM +/- 2 %