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Contact Supplier| Magnification | 20X ~ 300,000X |
| Resolution | 3nm with SE detector |
| Acceleration Voltage | 200V ~ 30kV Continuously Adjustable |
| Detector | SE, BSE (Optional) |
| Electron Gun | Precentered Tungsten Filament |
| Objective IRIS | 4-step Variable Aperture (20/20/50/100µm) |
| Image Shift | ±50µm |
| Stage | Manual 3-Axis stage (X,Y: 40mm / Z: 5~45mm), Manual (T: -20°~90° / R: 360°) |
| Optional Stage | Motorized 3-Axis stage (X,Y: 90mm / Z: 5~60mm), Manual (T: -20°~90° / R: 360°) |