Scanning Electron Microscope SU1510

Turbo Molecular Pump (TMP) is standard. As an oil-free pumping system, sample contamination is minimised. Unlike conventional oil diffusion pumped SEM, it does not require large heating capacity or water re-circulator, making it an energy saving ecological SEM.
To assist inexperienced users the SU1510 includes an on-screen operation guide that walks the user step by step through the complete imaging process – from vacuum mode selection to image capture. This unique feature allows users of all experience levels to quickly obtain high quality images.
The advanced technologies incorporated into the SU1510 provide a guaranteed secondary electron resolution of 3.0nm (high vacuum mode) and a guaranteed backscattered electron resolution of 4.0nm (variable pressure mode).
For quick observation of non-conductive samples the SU1510 utilizes variable pressure mode that eliminates negative charging, and provides the optimum conditions for both imaging and EDX microanalysis(*1).
The specimen chamber and stage have been designed to accommodate samples as large as 153mm in diameter. Simultaneous EDX microanalysis and imaging can be completed on a sample that is up to 60mm in height at the analytical working distance of 15mm.
The ESED-II(*2) is optionally available if secondary electron imaging in variable pressure mode is desired. This detector is integrated into the GUI of the SU1510 and is completely software driven with all automatic features ready for instant use by the operator.
(*1):Energy Dispersive X-ray microanalysis (option)
(*2):Environmental Secondary Electron Detector (option)
(*):Table is to be prepared locally.
(*):The images are simulated, and are not actual images.