- Supply TypeManufacturer, Exporter, Supplier
- Preferred Buyer Location All over the world
USED Gigabatch 360 Microwave Plasma System The GIGAbatch series is the latest and most advanced generation of MW batch ashers offered today and is the successor of the very popular Tepla 300 series. These are used extensively for photoresist ashing, descum, wafer cleaning, and silicon nitride etching. State-of-the-art process control in combination with microwave plasma generation are the key elements of the GIGAbatch family of products For more details: