Vacuum Metallizer Machine

PVD Deposition of Black Hard Films of Ti/TiN/Ti(N,C)/TiC by PVD Coater of Cylindrical Arc Source

Ti/TiN/Ti (N, C)/TiC multilayer composite films were realized to deposit on different hardness substrates by our self-made PVD coater of cylindrical arc source. The film is dark black and the reflectivity is less than 14%, the brightness value is 3, less than 43, the deposition rate is about 0.78 um/h, surface distribution with more drop defects. The mechanical property test of the film deposited is greatly affected by the hardness of the substrate and the thickness of the film. The harder the substrate, the thicker the film, the greater the hardness of the film and the binding force test results with the substrate. 0.82 um black hard film deposited on YW2 cemented carbide substrate demonstrates micro-hardness hv (25g) = 3229, with the binding force of 26.70N.