Chemical Vapour Deposition Systems

Listing ID #4152138

Get Latest Price

Supply Type Manufacturer, Exporter, Supplier

Preferred Buyer From : All over the world

QrystalTM is a research grade chemical vapour deposition system, with 12 independent temperature zones, each capable of reaching temperatures upto 1150 °C. It has an inbuilt precision mass flow....

View More Details

Send Enquiry

Product Details

QrystalTM is a research grade chemical vapour deposition system, with 12 independent temperature zones, each capable of reaching temperatures upto 1150 °C. It has an inbuilt precision mass flow controller allowing controlled injection of upto 4 gases. A back pressure regulator allows a fixed controlled pressure to be maintained throughout the deposition chamber.

Furnace : QBAKE-1100-3

Independent Heating Zones : 12
Maximum Temperature : 1150 °C for transient, 1100 °C for continuous operation
Uniform Temperature Zone Length : 200 mm
Temperature Uniformity : Better than ±5 °C within a zone
Heater Wire Material : Kanthal
Process Tube Material : Quartz
Process Tube Diameter : ID = 45 mm, OD = 48 mm
Embedded Temperature Sensor : K-type Thermocouple

Temperature Controller : TCON-12

Sensor Channels : 16
Sensor Type : K-type Thermocouple (or PT100)
Independent Control Loops : 12
Control Algorithm : Floating Point P-I-D
Temperature Stability : Better than 0.1 °C
PID Auto-tune : Yes
Heater Drive : 220V, 50 Hz

Vacuum System : VAC-10E-2

Pump Type : 2-stage, Rotary Pump
Pump Throughput : 15 m3/hour
Ultimate Vacuum : 10m-3 mBar
Vacuum Sensor : Pirani Gauge and ±15 psi tube pressure sensor mounted at the end of the quartz tube
Chamber Isolation : Butterfly Valve

Mass Flow Controller : MF02

Number of Channels : 4
Channel 1, 2 : 0-1000 sccm
Auxilliary Valves : 2/channel, one in series for true shutoff, one in parallel for flushing
Flow Stability : Better than 0.1% of full scale

Company Details

If you are interested to get your sample(s) scanned under an ambient Air STM, you can use the nanoREV facility available at QuazarTech.
Fill in the details of the sample in the form STM Sample Submission Form given here and e-mail it to support[at]quazartech.com and;
Courier us your samples to the following address.
The acknowledgement to your samples will be sent to the e-mail address specified in the form